![]() Depending on how far away the cleanroom equipment is from these vibration sources, and where in the structure the equipment is located, whether on the third floor or in the basement, for example, will determine how strongly the equipment will be influenced. Within the building itself, the heating and ventilation system, fans, pumps and elevators are just some of the mechanical devices that create vibration. Vibration can be caused by a multitude of factors. Increasingly, pneumatic air tables are taking a back seat to the more recent technology of negative-stiffness vibration isolation, which over the past 20 years since its introduction, has proven itself in thousands of applications throughout industry, government and academia, including some of the most diverse and challenging environments, such as cleanrooms. ![]() ![]() But just as technology has steadily pushed the boundaries into nano-applications in microelectronics fabrication, industrial laser/optical systems and biological research, so has the need become ever more necessary for improved precision in vibration isolation. For decades, pneumatic air tables have been the workhorse for reducing vibrations in cleanrooms for manufacturing and research, where critical micro-engineering instrumentation is employed.
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